Instrumentation Monthly Test | Measurement | Control
A NIMS-led research group succeeded in developing a high-quality diamond cantilever with among the highest quality (Q) factor values at room temperature ever achieved. The group also succeeded for the first time in the world in developing a single crystal diamond microelectromechanical systems (MEMS) sensor chip that can be actuated …
Read More »Development of MEMS sensor chip equipped with ultra-high quality diamond cantilevers
