Servomex publishes paper comparing key technologies for UHP gas analysis in the semiconductor industry

Servomex has published its latest expert paper, which compares gas chromatography using plasma emissions detectors (GC-PED) with atmospheric pressure ionization mass spectrometry (APIMS) for ultra-high-purity (UHP) gas analysis in the semiconductor industry.

Mass Spectrometry and Gas Chromatography are both methods which offer ultra-trace gas analysis solutions for the quality assurance of gases used in the semiconductor manufacturing industry. Each technique has its own advantages and disadvantages for specific process environments.

The expert paper gives readers an in-depth look at these positive and negative factors, and examines the different performance factors for each method when used within continuous quality control instrumentation.

The GC-PED technology discussed in the paper is a key feature of Servomex’s new SERVOPRO NanoChrome ULTRA multi-gas analyzer. The NanoChrome ULTRA is a flagship component of the new ULTRA Series of UHP gas analyzers, which combines exceptional performance and transformational specifications for the most stringent semiconductor demands.

The new ULTRA Series is due to be launched at the upcoming Semicon Taiwan exhibition in Taipei between September 23-25.

Download the full expert paper here:

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