With Bronkhorst’s FLOW-SMS, a variety of components for mass flow and pressure measurement and control can be assembled to constitute a compact gas delivery system.
One or more mass flow (or pressure) sensor/control modules can be combined with mixing chambers, shut-off valves, filters or any other functional module on a lightweight yet rugged rail system. Flow ranges can be selected between around 5mln/min up to 50ln/min or higher. In case a pressure sensor or controller is included, the pressure range can be chosen between 0-100 mbar and 0-10 bar absolute or gauge.
As standard, FLOW-SMS systems can be configured for up to nine channels